The Invatech Modular Raised Floor Enclosure is designed to contain facilities gas or chemical needs at the process tool in a convenient, compact and low cost package. The system replaces a standard raised floor 24” x 24” tile.

We start out with our standard view tile built from T6061 Aluminum extrusions, steel safety grate and clear view lid. From this rugged structure we add either metal or plastic enclosures that contain gases, chemicals, or any other utility required at the tool.

Standard open frame designs for inert gases, exhausted and enclosed designs for toxic, corrosive or pyrophoric gases are available as well as enclosures for chemicals, solvents and slurry’s. Boxes may be furnished with or without process controls inside.

Product Drawing